摘要
介绍了用粉末溅射做出的两种平面薄膜型酒敏元件的工艺、芯片结构和基本参数测试的结果。
The technics of two kinds of thin film gas sensors made by powder sputtering are introduced. The structure and the experimental results of basic parameters are given in this paper.
出处
《计测技术》
2006年第B09期71-74,共4页
Metrology & Measurement Technology
关键词
粉末溅射
薄膜
酒敏元件
powder sputter
thin film
alcohol sensor
