超纯水制备系统氮封装置的改进

Improvement of Nitrogen-sealed Unit in Ultra-pure Water Treatment System

针对超纯水装置中的氮封水箱消耗氮气过大的问题,分析了几种节省氮气的方法的优劣,提出了一种解决问题的氮封装置。

This article was aimed at improving Nitrogen-sealed water tank in Ultra-pure water equipment, which depleted too much purity Nitrogen. Based on analyzing several methods used for saving nitrogen, a novel design of Nitrogensealed unit was suggested to solve the problem.