微加速度传感器的结构刚度分析新法

A NEW METHOD FOR CALCULATING THE MICROSTRUCTURE'S STIFFNESS IN AN ACCELEROMETER

微传感器结构刚度是优化传感器结构尺寸、研究传感器动态响应特性的一个重要参数．目前多采用有限元分析获取这一参数,但该方法难于给出一个物理思想比较明确的解析表达式．针对自主开发设计的一种具有复杂微结构的加速度传感器,提出综合运用力法和能量法原理求解其主轴刚度,并通过仿真分析验证了理论推导．理论计算与仿真分析的结果有较好的一致性．该方法可推广应用于具有对称、静不定微结构的加速度传感器的刚度分析．

The stiffness of microstructures is an important parameter for microsensor, This parameter is usually obtained by FEM approach, and it is difficult to obtain an analytical expression. In this paper, a kind of microaccelerometer with a complex microstructure is designed and its main-axial stiffness is obtained by force method and energy method. The theoretical results are compared with those of FEM approach with good agreement. This methodology is extended to the stiffness analysis of microaccelerometer with symmetric and statically indeterminate microstructures.