摘要
介绍了采用增强透射矩阵进行计算的严格耦合波方法,将这种方法应用到介质反射光栅的多层膜计算中。通过与商用软件计算结果的对比,证明这种计算方法的计算结果是准确可信的。与已有的计算方法比较,该方法简化了介质反射光栅的计算工作。
Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings, enhanced transmittance matrix approach, is presented. This method is applied to the calculation of dielectric reflection gratings. The calculating result is precise and credible. Comparing with the existed method, this analyse dramatically simplifies the simulation process.
出处
《光学仪器》
2006年第4期27-30,共4页
Optical Instruments
关键词
介质反射光栅
严格耦合波方法
增强透射矩阵
多层介质膜
dielectric reflection gratings
rigorous coupled wave analysis
enhanced transmittance matrix
multilayer dielectric
