摘要
线性渐变滤光片是一种在小型快速分光测试设备中广泛应用的光学薄膜器件。讨论了各种线性渐变滤光片的设计方法;给出了用离子辅助沉积(IAD)工艺制备线性渐变滤光片的膜厚修正方法;并分析了线性渐变滤光片光谱测试时,滤光片线性色散系数,测试光斑尺寸对其光谱特性的影响,给出了相应的测试方法和测试结果。
Linear variable filter is a kind of optical coating device that be popular used in miniature fast spectrometer apparatus. The designing of various optical linear variable filters were discussed in this paper. The film thickness compensation method for production these linear variable filters by ion assisted deposition process were described. The linear dispersion, measurement light spot size and their effect on measurement of linear variable filter were investigated. The measurement parameter and measurement result of linear variable filter were given.
出处
《光学仪器》
2006年第4期95-103,共9页
Optical Instruments
