摘要
综合地介绍了类金刚石膜研究现状，着重说明了非晶碳类金刚石薄膜的摩擦学特性，分析了沉积方法、掺杂元素、摩擦环境、基体及对偶材料对其摩擦学特性的影响。最后，简要说明了非晶碳类金刚石膜应用情况。
Based on the research results of the authors, the current research of DLC films was introduced. The remarkable tribological properties of a-C Diamond-like carbon films were presented. The influence of deposition methods, incorporated elements, tribo-environments, substrate and couple materials on tribological properties of the DLC films was discussed in detail. Finally, the application of DLC films was introduced briefly.
出处
《装甲兵工程学院学报》
2006年第4期83-87,共5页
Journal of Academy of Armored Force Engineering
基金
国家自然科学基金项目(50575224)
关键词
非晶碳类金刚石
摩擦磨损性能
物理与化学气相沉积
a-C diamond-like carbon
friction and wear properties
physical and chemical vapor deposition
