摘要
介绍了集成电路制造中的用水,讨论了节水在该行业中的重要性。详细分析了用水的特征和可能实现的节水手段和方法,特别阐述了如何对生产过程中使用的超纯水进行节流回收和再利用有价值的废水,为实现环保节能的集成电路制造企业提供了现实可行的操作依据。
Water as one of necessary utilities used in semiconductor factory was introduced, it focused on the essentiality of water-saving in this field, and how to reduce water in the factory with feasible and economical methods were respectively described, especially emphasized on water reclaim in process and waste water reusing. It will be a helpful mean to the semiconductor factories that wish to be environment-friendly company.
出处
《半导体技术》
CAS
CSCD
北大核心
2006年第9期653-655,共3页
Semiconductor Technology
