CoS薄膜的制备和介电性质的研究

Preparation and Dielectric Properties Research of CoS thin Films

以CoCl2和Na2S为试剂,采用改进的化学浴沉积法在玻璃衬底上制备出了CoS薄膜,并分别以偏光显微镜和LCR仪对样品的形貌和介电性质进行了研究。

Cobalt sulfide（ CoS）thin films were deposited on glass substrates using a modified chemical bath deposition with cobalt dichloride（CoCl2） and sodium sulfide（Na2S）aqueous solutions. The pattern, dielectric constant and dielectric loss were measured using optical microscope and LCR apparatus, respectively.