摘要
主要研究了磁控溅射Nb层厚度与基体Zr-4合金之间附着力的关系,并对涂层的生长和经溅射后出现的一些现象进行了讨论。
The Nb-coating on Zr-4 alloy surface is deposited by magnetron sputtering. The relation between the Nb-coating thickness and the adhesion is mainly investigated. The growth mechanism and some phenomena were discussed for the depositing processing.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A02期313-315,共3页
Rare Metal Materials and Engineering
基金
核燃料及材料国家级重点实验室基金资助
关键词
磁控溅射
Nb涂层
附着力
magnetron sputtering
Nb-coating
adhesion
