原子力显微镜相位成像模式的设计及研究

Design and research of phase imaging-mode atomic force microscopy

相位成像模式是近几年发展起来的一种原子力显微镜的检测模式,该模式可以提供丰富的样品表面纳米尺度信息,是形貌像的有利补充。本文给出了一种应用于原子力显微镜轻敲模式的相位检测电路,结构简单,工作可靠稳定。通过实验获得了一些样品的相位像。

Phase Imaging is a newly developed detecting method of atomic force microscopy which can provide more nanoscale information of sample surface. In this paper, a new phase detect circuitry for atomic force microscope has been developed. The phase images and simultaneous topographies acquired by this circuit were presented.