小型低温真空光学实验装置设计

Design of small vacuum experiment equipment of cryogenic optics

为适应未来遥感光学系统研究的需要,研制了一套低温真空实验装置。该实验装置包括低温真空腔体、真空抽气系统、ZYGO干涉仪和防震平台以及监控测温系统。其中的低温真空腔体是针对小型光学元件实验设计的,主要用于测量光学元件的温度场和低温变形,并且把电机产生的局部热量尽可能导出系统。文中还对真空低温腔的关键部件光学窗口和梯形支撑的设计进行了详细分析。

For the demand of remote sensing optical system in the future, a cryogenic vacuum experiment system was designed.The cryogenic optical experiment equipment was comprised of cryogenic vacuum chamber, vacuum set, ZYGO interferometer, proof vibration sub-system and controlled measuring temperature＇ sub-system. The cryogenic vacuum chamber, specially designed to experiments of small optical elements, was mainly used to measure the temperature of optical elements and cryogenic distortion and transmitted local heat brought by the electromotor outside the chamber as soon as possible Ultimately, detailed analyses were presented about the design of the key part of cryogenic vacuum chamber the optical window and trapezia supports