磁控溅射法制备纳米Ag薄膜的AFM分析和导电性能

AFM analysis and conductivity of nano-structured silver film deposited by magnetron sputtering

在室温条件下,采用磁控溅射法在PET纺粘非织造布上制备了纳米Ag薄膜,用原子力扫描显微镜(AFM)分析溅射功率、溅射真空室气压等工艺参数对纳米Ag薄膜结晶状态、粒径的影响;研究了溅射工艺参数与薄膜导电性能之间的关系。实验结果表明,在室温下,随着溅射功率增加,纳米Ag薄膜Ag粒子尺寸增大,功率为120 W时,薄膜导电性能最好;随着反应气体压强增加,Ag粒子直径变小,薄膜的导电性能变差。

PET spun-bonded nonwoven fabric deposited with nano-structured silver thin film was prepared by magnetron sputtering at room temperature. The effect of technical parameters, such as sputtering power, vacuum pressure, on the morphology and particle diameters of the nano-structured silver thin film was analyzed by AFM（atomic force microscope）. The relation between sputtering parameters and the conductivity of the nano-structured silver thin films was also investigated, It showed that the increase in sputtering power resulted in the increase in the dimension of silver particles of the thin film. The best conductivity was achieved at the power of 120 W. Contrarily, the dimension of silver particle and the conductivity of thin films decreased as argon＇s pressure increasing.