模态分析在高精度加速度计结构设计中的应用

Modal analysis of structural design in high-precision accelerometer

石英振梁式加速度计是一种频率输出的高精度加速度计。石英谐振器是石英振梁式加速度计的关键部件。由于高动态性能要求,在结构设计阶段,必须对其进行模态分析。用模态分析理论和有限元软件工具,进行结构模态分析和谐响应分析,揭示其结构的静、动态性能。理论分析和计算机仿真结果表明所设计的结构能满足使用要求,同时为改善优化设计时的效率和质量提供依据和方法。

Crystalline quartz vibrating beam technology has been chosen for high precision accelerometer application to take advantage of frequency output characteristics. Quartz resonator is a key part of the quartz vibrating beam accelerometer. The design of high precision accelerometer demands that the accelerometer has good dynamic performance, so the modes of it must be analyzed in the stage of structural design. In the first, the theory of modal analysis is used in a key part of this accelerometer. Secondly, the analyses of its modes and harmonic responses are implemented by the finite element analysis tool and the static and dynamic characteristics of the key structural can be predicted. Theory analysis and software simulation show that the designed structure meets the requirement, which is helpful for improving the quality and efficiency in designing.