一种解耦的微机械陀螺研究

Research on decoupled micromachined gyroscope

设计了一种解耦的微机械陀螺,它能够极大地降低正交误差信号的影响,从而大大地提高陀螺的性能;制造了一批样机,进行了初步的驱动特性和敏感特性的实验研究。研制结果表明,陀螺性能符合设计要求。

A new decoupled micromachined gyroscope with decreasing cross-coupling errors is designed and tested. A batch of prototype gyro is manufactured and the preliminary experiment study on driving and sensing features is implemented. It indicates that the gyroscopes run in expected mode.