超精密工件台多维激光测量系统研究

Research on Multi-dimension Laser Measure System of Ultra-precision Stages

在分析超精密工件台运动特点的基础上,提出了一种基于多轴双频激光干涉仪的激光测量系统,搭建测量系统平台并建立了测量模型;这种测量系统运用在纳米级定位系统中,可以实现高分辨率低误差的位置测量,为工件台多自由度、大行程、高速高精的纳米级运动控制提供了重要保障。

On the base of ultra - precision stages＇ motion feature, a laser measure system based of multi - axis dual frequeney interferometer was introduced, and a measure platform combines with the measure model was put forward. Applying this measure system in nanoneter degree location system, location measurement with high resolution and low error can be realized, which provides great guarantee for the motion control system of stages with multi - dimension, long stroke, high speed and high accuracy.