微米尺度线电极的电化学腐蚀法制备

Fabrication of Micrometer Scale Wire Electrodes Using Eletrochemical Etching

微细电化学线切割加工是最近出现的一种微细加工新方法。本文基于电化学腐蚀原理,制备微细电化学线切割加工中使用的微米尺度线电极。建立了腐蚀过程理论模型,通过测量线电极的电阻变化来实时监测线电极腐蚀过程中的直径大小,并基于虚拟仪器技术建立了线电极制备监控系统。通过试验对钨线电极的腐蚀过程进行分析,得出监控系统的直径计算值与实际值误差低于10%。最后,利用此方法制备出直径5μm的钨线电极。

Wire electrochemical micromachining （WEMM） is a recent new method for micro-machining. Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM. A theoretical model for the electrochemical etching process was developed, the diameter of wire electrode was monitored by measuring the variation of the electrode resistance, and a monitoring system used for fabricating the wire electrodes was established on the basis of virtual instrument technolo- gy. An experiment was conducted to analyze tungsten wire electrode etching processes and the error between the diameter calculated by the monitoring system and the actual diameter was less than 10 percent. A tungsten wire electrode with the diameter of five micrometers was prepared by using the method.