摘要
利用波长为10.6μm的CO2连续激光诱导化学气相沉积的方法,在模具钢基体上沉积TiN类薄膜。采用XRD、OM、SEM、EDS等手段分析薄膜的组织和相结构。实验表明,当激光功率为600W,扫描速度为2mm/s,通过H2、N2和TiCl4之间的化学反应,在模具钢表面获得了均匀致密的枝晶组织,其显微硬度最高可达2500HV。
The TiN thin film was produced on die steel substrate by wavelength of 10.6μm CO2 continual laser chemical vapor deposition （ LCVD ）. The microstructure and morphology of the TiN thin film were characterized by X-ray diffraction （ XRD ）, optical microscope （ OM ）, scanning electron microscope （ SEM ）, and energy disperse spectrometer （ EDS ）. The result indicated that only when the laser power was 600W and scanning velocity was 2mm/s, through reaction of HE, N2 and TiCl4, the TiN film would be deposited on die steel substrate by LCVD with dense dendritic structure and 2 500HV micro-hardness.
出处
《模具技术》
2006年第5期7-10,共4页
Die and Mould Technology
基金
江苏省教育厅自然科学研究指导性项目(04KJD430011)
