溶胶-凝胶工艺制备SiO_2薄膜的结构控制和稳定性研究

Structure control and stability in preparation of silica film via Sol-Gel process

采用溶胶-凝胶工艺在酸性、碱性和碱/酸两步催化条件下制备纳米多孔结构的SiO2薄膜。使用透射电子显微镜(TEM)、激光粒子分析仪测试了溶胶的微观结构和颗粒分布;使用反射式扫描椭偏仪、扫描电子显微镜(SEM)、原子力显微镜(AFM)测试了薄膜的光学性能和微观形貌。结果表明:通过改变溶胶-凝胶过程中的催化条件可控制薄膜微观结构和光学性能。溶胶在长期存贮期间符合镀膜的稳定性要求。

In this paper, nano-porous silica films are prepared via Sol-Gel process with base, acid and base/acid two-step catalysis. TEM and Particle Size Analyzer are used to characterize the properties of the microstructure and particles size distribution of the sol. FE-SEM, AFM and Spectroscopic Ellipsometer are used to characterize the surface microstructure and optical properties of the film. Structure controlling by changing the catalysis conditions during Sol-Gel process is investigated, and the stability of the sol during long-term storage is studied.