摘要
本文阐术了在Ｓ－１４００正胶中加入适量咪唑，使正胶不仅具有原来特性，而且经一定工艺处理后还具有负胶的功能。在制造铬板时，用这种胶涂敷的铬板既可当正胶板用也可作负胶板用，即得到“正负两型”铬板。
Image reversal of S - 1400 series photoresist from positive to negative has been realized by added proper imidazole in it. In the chrome plate making, the chrome plate which was coated with the photoresist not only has the characteristic of positive but also that of negative.
出处
《微电子学与计算机》
CSCD
北大核心
1996年第3期53-55,共3页
Microelectronics & Computer
基金
国家自然科学基金
关键词
铬板
图象反转
正胶铬板
集成电路
光刻
Chrome plate
Positive photoresist
Image reversal technique
