高精度间隙补偿式闭式气浮导轨性能的分析研究

Analysis and Research on Performance of Enclosed High Accuracy Air Slideway with an Unit Compensating Airspace Error

本文主要研究了一种用于长行程、高运动精度要求的间隙补偿式闭式气浮导轨。在此气浮导轨中采用了气足为气浮导轨的基本单元,其中两侧气足与工作台体的连接采用了自准式定位连接结构,以降低气足与工作台体刚性连接时的高形位公差要求,同时一侧气足与弹簧串联后与工作台体连接,这样有效地补偿了长导轨两导向工作面不平行所造成的气膜间隙变化,从而降低了导轨形位公差的要求。

The paper descibes design on the encloses air slideway with an unit compensating airspace error to meet requirements in long traveling and high accuracy.The feet in the sides of the slideway are connected with the working stage body by self-collimating positioning connecting structure to reduce severe requirements of shape and position tolerances as the air feet connecting with the stage rigidly,and the foot on one side is connected with the stage by the spring,which can compensate change of air film introduced by unparallelism of working surfaces of tlong guides in two directions so as to reduce requirements of shape and position tolerances of the guides.