基于谐振原理的微机械疲劳试验装置的研究

STUDY ON A MEMS FATIGUE TESTING DEVICE BASED ON THE RESONANCE PRINCIPLE

设计出一种基于梳状驱动器原理的静电力驱动的微机械疲劳试验装置,该装置可由典型的表面牺牲层标准工艺制作。对所设计的MEMS(micro-electro-mechanical system)疲劳试验装置中的圆弧梳状驱动器的电容及静电驱动力进行理论分析,并采用ANSYS机电耦合单元对装置的振动过程进行模拟,模拟结果与理论分析相吻合。研究结果表明在一定范围交流电压的驱动下试样能达到MEMS疲劳测试所要求的应力水平,并对该电压范围进行预测。

A novel MEMS（micro-electro-mechanical system） fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.