摘要
采用了欧拉方程数值解法和有限元数值计算方法,将“优化法”和“修正法”结合起来进行透镜设计.获得了电子探针中物镜的最佳场分布,并用线性场来逼近该场,有效地改进了物镜的性能.综合考察了各种象差的影响之后,提出了物镜的最佳长度线性场的最佳上升和下降梯度,从而改进了物镜的设计工作.计算工作在IBM-370机上完成.
In the paper The author designed an objective lens by combining ' Optimum method ' with ' modify measurement ' in which numerical solution of Enler's equation and limited elements calculation have been used. A optimum field in the objective of the electron probe can be obtained with which a linear field may be taken to approach along. Having considered the effects of the various electron optical aberrations, he has approved an optimum gradient of rising in the linear field. The computing was made on IBM-370 computer.
出处
《贵州科学》
1996年第4期17-22,共6页
Guizhou Science
