摘要
文章介绍了一种新型的微质量传感器,通过测量QCM的谐振频率变化得出在QCM传感器表面吸附的微质量变化。文章还详细介绍了QCM传感器的设计和夹具的结构设计,并用ANSYS 9．0对QCM传感器进行了三维有限元建模,分析了电极尺寸对有限元谐振元振动特性的影响,提出了优化设计的方案,最后进行了实验。实验结果与理论值基本相同,从而证明了结构设计的合理性。
In this paper, a new contamination on the surface of QCM （ micro - mass sensor is developed to detect the mass of micro - Quiz Crystal Microbalance）. The designs of clamp and circuits are introduced. By using the 3D software of Ansys 9. 0, the vibration of QCM is analyzed. The optimization of electrode of QCM sensor is performed by analyzing the influence of scale of electrode to the vibration of QCM. For the analysis result accords with the experiment result and theory result significantly well, the validity of the structure design is proved.
出处
《机电一体化》
2006年第5期18-22,共5页
Mechatronics
关键词
微质量传感器
QCM
结构设计
有限元分析
micro - mass sensor
QCM （ micro crystal microbalance）
structure design
finite elements analysis
