晶体性能综合检测仪研究

Study of an integrated measurement instrument for properties of crystal

本文研制了一种晶体的静态消光比、电光晶体的静态消光比或动态消光比、电光晶体的半波电压和波片的相位延迟的综合性自动化测量仪。该仪器采用偏振光干涉测量技术、调制光源技术、解调电路、软件除法技术,将光、机、电一体化技术和计算机控制技术有效地结合起来,既可用于科研,也可用于生产现场,实现晶体消光比、半波电压和波片相位延迟3个参数的一体化快速自动化测量。实践证明,运用文中的测量原理和方法,晶体的消光比测量可达到10-6,波片相位延迟的测量重复性精度优于0.5°,此外,运用电光晶体的纵向调制技术,还可精确测量出电光晶体的半波电压。

An integrated and automated measurement instrument was developed, which measures the static extinction ratio of crystal, the static or dynamic extinction ratio and the half wave voltage of electro-optic crystal, and the phase retardation of wave plate. By using technologies of polarized light interferometry, modulated light source, demodulation circuit and division computing algorithm, the instrument effectively combines optical, mechanical and electronic technologies with computer control technology, and can be used to measure the above-mentioned parameters automatically and effectively not only for laboratory research but also in product line. The test result indicates that with the proposed measurement theory and method, the extinction ratio of crystal can be measured to 10^-6, the repeat accuracy of the phase retardation of wave plate can be measured to better than 0.5°. Moreover, by using the longitudinal modulation technology, the half-wave voltage of electro-optic crystal can be measured accurately.