磁悬浮式纳米级微动工作台的理论分析与建模研究

Theoretical analysis and modeling of a magnetic levitation micromotion stage

磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围纳米级精度的微运动。本文构建了一种新型的磁悬浮微动工作台,从理论上对磁悬浮式微动工作台的运动机理进行了详尽分析,建立了磁悬浮式微运动的电磁驱动模型,用Matlab对磁悬浮式微动工作台的运动控制进行了仿真研究,结果表明,设计的磁悬浮式微动工作台能达到纳米级的微运动。本文的研究成果为磁悬浮式微动工作台的设计及其控制提供了理论基础。

Magnetic levitation stage is easy to realize micromotion with nanometer resolution because the contact-free magnetic levitation technique is used between the moving plate and the driving part. In this paper, a novel magnetic levitation micromotion stage is proposed, the movement mechanism of the stage is theoretically analyzed in detail, and the electromagnetic driving model of the stage is presented. The stage motion control was simulated with Matlab software. The theoretical analysis and simulation result show that the designed magnetic levitation micromotion stage can realize nanometer scale micromotion. The suggested mathematic model offers a theoretical foundation for the design and control of magnetic levitation stage.