激光驻波场中Cr原子运动轨迹与汇聚沉积的分析

Analysis of Cr atom trajectory and focusing deposition in the standing wave field

利用半经典模型,从铬原子在激光驻波场中的运动方程出发,通过数值解方法模拟了铬原子在驻波场中的运动轨迹,并分析了原子的纵向速度分布和准直程度及球差对沉积条纹结构的影响,同时也讨论了基片摆放位置对沉积条纹结构的影响,并通过实验得到了纳米光栅条纹结构.

The laser-focused atomic deposition is a new way to build the nano transfer standard of high reliability adequate for application. Based on the semi-classical model, this paper starts from the motion equation of chromium atom in the laser standing wave field to get the trajectory of the atoms in the standing wave field by analytical simulation. The effects on focal line features are discussed as a result of the angular collimation, velocity spread in the atomic beam and the spherical aberration. The effects from different deposition positions are also discussed. This paper also gives a sample of the grating structure nanofabricated by laser focusing of Cr atoms