直线位移工作台运动误差补偿方法研究

Comoensation of Kinematic Error of Linearly Mouving Cariage

为了减小直线位移工作台的导轨运动误差,研究了一种基于光学原理,采用四象限光电探测器,通过计算机系统对工作台产生的导轨运动误差进行自动补偿的方法.根据补偿原理,构建了误差补偿数学模型,分析了光学系统的参数和系统输出特性之间的关系,并通过实验,阐述了影响补偿系统灵敏度的相关因素.实验表明该方法能够实现优于0.24 V/μm的灵敏度,补偿精度可达到0.4%.这种方法能够有效地提高直线位移工作台的工作精度,对行程小于100 mm的直线位移工作台具有一定的推广价值.

In order to decrease the kinematic error of linearly moving carriage, a method of automatic compensation for kinematic error based on the optics theory is introduced. A four quadrant photoelectric detector as a well as a computer system are adopted. The mathematical model of error compensation has been built according to the compensation theory. Meanwhile, the relationship between the parameter of optic system and output characteristics of system has been analyzed. By experiment, some factors influencing to the sensitivity of compensation system is presented. The results show that the method has better sensitivity than 0.24 V/μm and the accuracy of error compensation is less than 0.4%. The method has improved the accuracy of linearly moving carriage greatly. The priciple can a be applied for the application of some linearly moving carriage whose stroke is less than 100 mm.