新型半导体集成磁敏传感器的研究

Research on Novel Semiconductor Integrated Magnetic Field Sensor

本文论述了一种新颖的集成磁敏传感器。它是以互补三漏MOS晶体管为磁敏器件，采用半导体集成电路技术，将放大电路，偏置电路与磁敏元件集成在同一芯片上。该传感器具有灵敏度高、功耗低和体积小等特点。本文详细地分析了传感器的磁敏原理和电路结构，并对传感器的磁敏特性进行了测量和讨论。实验结果基本符合理论设计。

This paper describes a new kind of integrated magnetic-field sensor which has a magnetic-field sensitive device with complement triple-drain MOS transistor. The magneticfield sensitive device is integrated with the ampliflier circuits and bias circuits on a same chip by semiconductor integrated technology. The sensor has an advantage with high sensitivity, low power consumption and small volume. The magnetic-field sensitive principles and circuit structures of the sensor have been analyzed in detail. The magnetic-field sensitive characteristics are measured. The experimental results agree with the theoretical design basically.