摘要
微机电系统(MEMS)测试的主要目的是为工程开发中的设计和模拟过程提供数据反馈,其中一个重要方面就是MEMS器件运动特性的高速可视化。基于计算机控制的频闪干涉测试系统,文中提出了一种时间轴和空间轴双向解包裹的干涉条纹分析方法,实现了MEMS器件离面运动参数的精确测量,并与微结构平面结构图像模板相结合,可以进行MEMS器件全视场运动的分析,达到了纳米级分辨力。
A key purpose for testing Microelectromechanical systems （MEMS） is to provide data feedback of measurements to the design and simulation in the process of development, where high-speed visualization of dynamic properties of MEMS devices is a very important aspect. This paper describes a computer-controlled stroboscopic interferometer system for measuring out-of-plane motions of MEMS structures with nanometer resolution. In the out-of-plane motion measurement of MEMS, a two-direction phase-unwrapping method based on time axis and space axis is demonstrated. And the time and space information of MEMS motions are combined in favor of analyzing MEMS dynamic behaviors. In addition, 3D motions of MEMS devices technology based on mask. can be measured by using the full field rebuilding
出处
《光电工程》
EI
CAS
CSCD
北大核心
2006年第9期75-79,共5页
Opto-Electronic Engineering
基金
博士后科学基金(2005037527)
精密测试技术及仪器国家重点实验室开放基金资助项目
关键词
微机电系统
微谐振器
动态表征
模板
三维重建
Microelectromechanical systems（MEMS）
Micro-resonator
Dynamic characterization
Mask
3D rebuilding
