梯度多层BST薄膜介电性能研究

Dielectric Properties of Compositionally-graded and Multilayered BST Thin Films

成分梯度多层钛酸锶钡薄膜具有较好的综合介电性能,包括适中的介电常数、高的介电调谐率、低的介质损耗及低的介电温度系数等,日益成为微波调制器件如移相器、滤波器、谐振器等的重要候选薄膜材料。就国内外近年来取得的重要成果进行了综述,对今后成分梯度多层BST薄膜的研究前景及方向进行了展望。

Compositionally-graded and multilayered Ba1-xSrxTiO3 thin films have exhibited and/or will exhibit excellent dielectric properties such as moderate dielectric constant, high dielectric tunability, low dielectric loss, low dielectric-temperature coefficient, etc. They have been considered to be increasingly important candidates for tunable microwave devices including phase shifters, filters, oscillators, etc. In this paper, some important results have been reviewed. The prospective research on directions of compositionally-graded and multilayered model of BST thin films in the future are prospected.