摘要
介绍了一种基于体硅微机电系统(MEMS)工艺制作的扭摆式硅微机械加速度传感器,对制作过程的一些工艺问题进行探讨,并提出相应的解决办法,主要涉及到硅-玻璃阳极键合、结构释放等关键工艺。对测试结果进行了初步分析,分辨力可以达到1mgn,测试±1gn范围内线性度可以达到99.99%。
A pendulous micromachined silicon accelerometer is introduced based on bulk silicon MEMS technique,the ways of solving some technique problems in production process are explored, such as the anodic bonding of silicon and pgrex,structure etching and structure release. Test datas show that the resolution of system is 1 mgn,linearity is 99.99 % at the range of ±1gn.
出处
《传感器与微系统》
CSCD
北大核心
2006年第8期85-88,共4页
Transducer and Microsystem Technologies
