半导体制造设备的维修调度研究

Research on Maintenance Scheduling for Semiconductor Manufacturing Equipment

对半导体制造设备的维修调度问题进行了研究,提出了半导体故障设备维修人员分配法,解决了在有限的维修人员条件下制订优化的维修调度方案问题。有限维修人员条件下的半导体故障设备维修人员分配法分两步实现,首先通过求解模型得到一个优化的维修人员首次分配方案,再用最大优先度原则进行维修人员的再分配,直至全部的故障设备都得到维修。提出了用遗传算法求解用于维修人员首次分配的故障设备维修调度优化模型的方法,提出了用于进行维修人员再分配的最大优先度确定方法。最后,用一个实例示例了有限维修人员条件下的半导体故障设备维修人员分配法的实现过程,并对结果作了分析。

The problem of maintenance scheduling for semiconductor manufacturing equipment was studied. A staffing method was developed to assign a limited number of maintenance personnels to semiconductor failure equipment. Optimal maintenance scheduling can be attained by this staffing method. It needs two steps to realize this staffing method. First assign all maintenance personnels by solving the failure equipment maintenance scheduling optimizing model, and then assign the maintenance personnels released by failure equipment that has been repaired to the remaining failure equipment that is still waiting for the maintenance personnels according to maximum priority rule. A GA method was devised to solve the failure equipment maintenance scheduling optimizing model, and the way to calculate the maximum priority rule was also devised. Finally a case study was presented to demonstrate this maintenance personnel assigning method.