基于QFD的代工型晶圆厂生产绩效评价

Evaluation of Production Performance in Foundry Wafer Fabrication Based on QFD

利用质量机能展开(QFD)方法中面向客户需求的思想,提出一种基于QFD的代工型晶圆厂生产绩效的评价方法。通过确定客户需求和晶圆厂生产指标体系,构造了质量层,并给出了绩效评价步骤。案例结果也表明了方法的有效性与实用性。

With the idea of Quality function deployment （QFD）, an evaluation approach for the production performance of foundry wafer fabrication was presented. After determining customer demand and production index of wafer fabrication, house of quality （HOQ） was constructed. Meantime, evaluation steps for wafer production performance were also given. The case results show the valid- ity and practicability of the method.