真空溅射加工用铁氧体粘接件的制备

Preparation of bonded ferrite used for vacuum spattering processing

主要介绍了高温粘接技术在铁氧体环真空溅射加工中的应用,通过对耐高温胶粘剂的优选及工艺实现途径的探索,较好地将多个铁氧体环粘接为一体。并在其外表面溅射镀铜,粘接强度及粘接精度在高温环境下均达到设计要求。

The article introduced the application of high temperature binding technique of ferrite loop in vacuum spattering process. The selection of high-temperature-resisting adhesive and researching of process approach enable to bind multiple ferrite loops together and to plate copper on their surfaces were presented. The bonding strength and precision at high temperature satisfied the design requirement.