降低电感接触式测量仪系统误差的方法研究

Research on the Means for Reducing the System Error of Contact-inductance Profilometer

本文分析了传统电感接触式测量仪的系统误差,提出了一种基于垂直位移扫描工作的表面轮廓综合测量仪的整体设计方案,克服了接触式测量仪的大量程和高精度之间的矛盾,给出了实际测量结果。

Bring forward a whole frame project of profilometer based on the vertical scanning of displacement after analyzing the system error of tradition inductance contacting profilometer in this paper. This kind of profilometer can overcome the conflict between the large-range and the high-precision of measuring which exists in the contacting profilometer. The experimental results of surface profile are also presented.