深孔表面三维形貌测量与控制装置的研制

Development of Measuring and Controlling Device for 3-D Topography of Deep-hole Surface

针对深孔表面三维形貌难于检测的问题,在传统的触针扫描技术的基础上,利用柱面激光—全息光栅传感器,设计出了独特的光栅信号采集处理电路,采用大小数细分与融合的方法,来进行表面微观轮廓信息的采集。由上位机通过PCI总线的多功能板卡及步进电机细分驱动器来进行触针轴向微位移量的高精度运行控制,较好地实现了对深孔表面三维形貌的测量。详细介绍了深孔内表面三维形貌的测量与控制装置的测量原理、软硬件设计及特点,并给出了实验结果。

In order to solve the difficult problem of 3-D topography in the detection of deep hole surface, on the basis of traditional method of contract needle interval scanning, using column laser holographic grating sensor, design a unique grating signal acquiring and processing circuit, which adopts the method of subdivision and mixture of big ＆ small digital to acquire information of microcosmic surface topography. High precision movement control of axial micro-displacement of contact needle executed by monitoring computer via multifunction card of PCI bus and subdivision drive of stepper motor, the measurement of 3-D surface topography in the deep-hole can be perfecfly realized. Measurement of 3-D surface topography in the deep-hole, the measuring principle of control device, design of software ＆ hardware and characters are described in detail. Finally, an experiment result is presented.