一种硅基静电微马达

A Silicon-Based Integrated Micromotor

本文介绍我们最近研制的一种硅基集成微马达。其制作工艺非常简单，仅包括四次光刻、两次多晶硅膜淀积和两次ＳｉＯ２牺牲层淀积。实现了快速、方便及批量地制作测量分析用的微马达样品。该微马达转子和定子由厚度为２．５μｍ左右的ＬＰＣＶＤ多晶硅膜一次形成，因而转子与定子的间距可减小到１０～１．５μｍ。初步测量结果表明，微晃动马达的最低驱动电压为４９Ｖ，最高转速估计可达６００ｒｐｍ。

A silicon-based integrated micromotor is reported in this paper.The process for this motor is very simple which includes four photolithographies,two LTO film and two LPCVD polysilicon film depositions. Both the rotor and stator are made of a 2.5μmthick polysilicon film. The gap between the stator and rotor is 2.0～2.5μm,and the radius of the rotors are 40～ 50μm, The measurements show that the minimum drive voltage is 49V and the maximum rotational speed is up to 600 rpm.