微型静电悬浮Z向加速度计的计算机模拟

COMPUTER SIMULATION OF MICRO- MACHINING Z-AXIS ACCELEROMETER WITH AN ELECTROSTATIC LEVITATING SEISMIC MASS

本工作针对一种新型的电容式力平衡加速度计－微型静电悬浮Ｚ向加速度计进行了计算机模拟。模拟中的Ｚ向加速度计拟采用微机械加工技术在硅片上制作，利用静电悬浮原理平衡质量块，感应加速度并输出信号。计算机模拟分析了加速度计的悬浮特性，稳定特性，响应特性。对Ｃ－Ｆ转换电路的输出特性也进行了分析，该电路可用ＣＭＯＳ工艺集成在加速度传感器的周围。模拟结果表明该加速度计具有灵敏度高，抗冲击性能好的特点。

Anew silicon capacitive accelerometer with force balance technology is proposed. The micromachining technology is suggested to fabricate the accelerometer.Based on the principle of electrostatic levitation,the seismic mass is levitated and feels the acceleration.Arelated circuit which can be integrated around the sensor is simulated. After analysis of the characteristics of its levitation, stability,dynamics and the related circuit, it is found that the sensitive element is very rigid and its sensitivity is about 40kHz/g.