激光LIGA工艺实验设计

EXPERIMENT AND DESIGN FOR LASER LIGA PROCESS

文章介绍了一种用于准分子激光深层光刻实验装置的设计，并根据该设计思想进行了可行性原理实验，取得了较好的结果。

The design of experimental apparatus used for deep-etch excimer laser lithography is introduced in this paper, According to the design idea an experiment has been performed to verify its feasibility and a good experiment result has been obtained.