石英晶体上的声表面波陀螺效应

Surface Acoustic Wave Gyroscopic Effect in Quartz

声表面波(SAW)传感器作为一种新型传感器具有许多突出的优点,其中以测量角速度为目的的SAW陀螺是其潜在应用之一。但目前对SAW陀螺的研究局限于试验研究和简单的理论分析。基于以上研究背景,以附加陀螺效应的各向异性压电介质波动方程为基础,定量分析了X切、Y切、Z切石英的SAW陀螺效应,确定了石英晶体X切(90°,90°,130°)、Y切(0°,90°,45°)、Z切(0°,0°,25°)等敏感切向,为SAW陀螺的进一步研究提供了理论指导。

As a new type sensor, surface acoustic wave （,hAW） sensor nas many outstanding advantages.The SAW gyroscope which is used to sense angular rate has already become one of the potential applications. But the nowaday researches on SAW gyroscope are concerned with experimental research and simple theoretical analysis only. Inspired by the research background, based on the wave equation on anisotropic piezoelectric crystal with gyroscopic effect, some quantitative analyses of SAW gyroscopic effect in X-cuts, Y-cuts and Z-cuts are given for the piezoelectric quartz in this paper. The sensitive cuts of quartz, such as （90°, 90°, 130°） in X-cuts, （0°, 90°, 45°） in Y-cuts, and （0°, 0°, 25°） in Z-cuts are determined accordingly. The researches mentioned above provide guide for the further research of SAW gyroscope.