一种简易的多自由度微位移器

A Primitive Multi-freedom Micro-Actuator

具有三自由度的微位移器的组成为:掺Sr和Mn的PZT制成的厚度为0.15 mm的二个同心圆环,用有机胶水紧密地粘贴在一个铜圆片上,铜片的中央焊有一根长100 mm,直径φ2.5 mm的铜杆,其端头安装一个由陶瓷片做成的小平台,作为微位移器的工作台。在外圈的PZT陶瓷环被四等分成四个彼此分开的扇形,其中相邻二个扇形的极化方向与中央PZT陶瓷环的极化方向相同,其余两个扇形的极化方向则与此相反。中央陶瓷环和极化方向不同的二组陶瓷扇形分别同3个直流电源相联。通过适当变化加在三组压电陶瓷上的电压,引起压电陶瓷变形,从而使与之相联的铜片发生弯曲形变,带动其中心铜杆顶端的平台,使之既沿垂直方向(z轴)移动,又围绕z轴作x,y方向的运动。

A micro-actuator with 3 freedoms consists of two concentric rings with thickness of 0. 15 mm made of PZT doped with Sr and Mn, a copper disc on which the PZT rings are firmly mounted with organic glue. A copper rod of Ф2.5 min× 100 mm is stuck at the center of the disc, and a ceramic substrate serving as working platform is mounted on the top of the copper rod. The outer PZT ring is equally divided into four quadrants separated each other, of which two vicinal parts are poled with the same direction as that of the inner PZT ring. The other two quadrants in the outer ring are poled with the opposite direction. The inner ring and the four quadrants of the outer ring are excited by three DC powers, respectively. Bending deformation of the copper disc is caused by properly regulating the excitation voltages exerted on the PZT ceramics. The ceramic platform moves along z direction （perpendicular direction） as well as around z direction （x and y directions） driven by the bending deformation of the copper disc.