ECR微波等离子体源离子渗氮

Electron Cyclotron Resonance Microwave Plasma Source Ion Nitriding

研究了一种新的低温渗氮方法──电子回旋共振（ＥＣＲ）微波等离子体源离子渗氮。对纯铁、４５钢和３５ＣｒＭｏ钢试样在１５０～３５０℃进行渗氮处理，测定了渗氮层的硬度和晶体结构。结果表明，纯铁在低于２００℃的温度下即可获得连续分布的表面氮化物层，３５ＣｒＭｏ钢在低于２５０℃温度处理也可获得良好的渗氮层。

A new low temperature nitriding approach──'Electron cyclotron Resonance Microwave Plasma Source Ion Nitriding'was inverstigated.Pure iron,45 steel and 35CrMo steel were treated with the nitriding technique and the surface hardness and crystal structure of the nitrided layer have been determined.The experimental results show that a continuous nitride layer could be created on pure iron surface at lower than 200℃ and a hardened layer could be obtained on 35CrMo steel at lower than 250℃with this new technology.