子孔径拼接检测非球面的初步研究

Preliminary study on the test of asphere using sub-aperture stitching method

使用子孔径拼接技术可以无需补偿器、大口径的辅助镜、全息图等辅助元件实现对大口径、大偏离量、高陡度非球面甚至离轴非球面的检验,而且可以同时获得中高频的相位信息,大大地提高了测量精度,降低了成本。在总结了常用检测非球面方法优缺点的基础上提出了利用圆形子孔径、环形子孔径检测非球面的基本原理,并对其步骤的实现、数学模型的建立和拼接算法的开发进行了分析和研究。结果表明,子孔径拼接检测技术可以作为补偿检验以外的另一种定量测试非球面的手段,可以和其它检测方法相互验证,从而确保检测的准确性和可靠性。

Sub-aperture stitching technology can test large aperture, large departure, steep aspheric surface and even offaxis asphere without assistant part such as compensator, heavy-caliber auxiliary mirror and hologram. And also it may obtain the mid and high frequency of the phase information at the same time, so it increases the precision and reduces the cost greatly. On the basis of summing up conventional testing methods for asphere, the basic principle of the circular sub-aperture and annular sub-aperture stitching method were proposed. Its step realization, the mathematical model establishment and the splicing algorithm development were researched. The result shows that the sub-aperture stitching test technology may take as another quantitive measurement, it may confirm mutually with other test methods. The accuracy and reliability of the test are guaranteed.