期刊文献+

基于Radon变换的横向剪切干涉图的自动检测技术 被引量:4

The inspection technology of the displacement of shear on the lateral shearing interferometer based on Radon transform
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摘要 在分析测试原理的基础上,指出了现有方法的横向剪切量获得的不足,根据剪切图和Radon变换在边缘处具有突变的特点,提出了一种基于Radon变换的横向剪切干涉图的剪切量的自动检测方法,首先根据二维图像的Radon变换结果,得到剪切图的横向移动方向,对图形进行方向校正。然后利用干涉图形的特点对图形在X和Y方向上进行Radon变换,得到剪切量。利用MATLAB进行编程,实验结果表明该方法具有很好的性能和较高的实用价值。 The shortage of existing method, which the shearing displacement was obtained, was pointed out. Based on the characteristic of shearing image and Radon transform with catastrophe point in the edge, the new inspection method of shearing displacement based on Radon transform was put forward. The direction of lateral shift was found form Radon transform. The slope of image was revised. The shearing displacement in direction of X and Y were obtained form the Radon transform by MATLAB. This method was proved with good performance and upper practicality value.
出处 《光学技术》 CAS CSCD 北大核心 2006年第5期785-786,789,共3页 Optical Technique
基金 陕西省教育厅专项科研计划项目(03JK170) 学校重点基金的支持
关键词 非球面检测 剪切干涉 剪切量 RADON变换 aspheric inspection shearing interferometer shearing displacement Radon transform
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  • 1[苏]普里亚耶夫T.光学非球面检测[M].北京:科学出版社,1982.80-90.
  • 2田中康弘.用激光束测量陡峭非球面的表现形状[J].国外计量,1984,(5):1-6.
  • 3[1]Abe Offner. A null corrector for paraboloidal mirrors[J]. Applied Optics, 1963,2(2):153~155.
  • 4[2] Stephen D Fantone. Holographic interferometer for testing aspheric molds and molded parts[J]. Applied Optics, 1983,22(8):1121~1226.
  • 5[3] Bernd Dorband, Hans J Tiziani. Testing aspheric surfaces with computer-generated holograms:analysis of adjustment and shape errors[J]. Applied Optics, 1985,24(6):2604~2611.
  • 6[4] Akria Ono. Aspherical mirror testing with an area detector array[J]. Applied Optics, 1987,26(10):1998~2004.

共引文献11

同被引文献31

  • 1曾新,丁剑平,梁佩莹,陈志一.二维剪切干涉波前的最小二乘法重建[J].光学学报,2005,25(3):335-340. 被引量:13
  • 2张伟,刘剑峰,龙夫年,王治乐.基于Zernike多项式进行波面拟合研究[J].光学技术,2005,31(5):675-678. 被引量:35
  • 3WOLFGANG STEINCHEN, LIANXIANG YANG, GERHARD KUPFER, et al. Application of laser di- odes in digital speckle pattern shearing interferometry [J]. SPIE, 1998, 3415:87-94.
  • 4FERRAROA P, ALFIERIA D, DE NICOLAB S, et al. Combining lateral shear interferometry with digital holog- raphy for quantitative phase microscopy[J]. SPIE, 2006, 6341 : 1-6.
  • 5HAREESH V, TIPPUR, LIMING XU. Real-time shear- ing intefferometry for studying interracial crack tip fields under quasi-static and dynamic loading conditions [J]. SPIE, 1995, 2544:223-235.
  • 6GUO Xiao-xian, ZENG Ai-jun, HUANG Hui-jie. Spa- tial phase-shifting lateral shearing interferometer[J]. SPIE, 2009, 7160: 1-8.
  • 7RYAN MIYAKAWA , PATRICK NAULLEAU, KEN GOLDBERG. Analysis of systematic errors in lateral shearing interferometry for EUV optical testing[J]. SPIE, 2009, 7272: 1-6.
  • 8JOSEP VIDAL, JOSEP NICOLAS, JUAN CAMPOS. Analysis of the positioning error on lateral shearing sur- face reconstruction with a Fizeau interferometer [J]. SPIE, 2009, 7390: 1-8.
  • 9WOLFGANG STEINCHEN, LIANXIANG YANG, GERHARD KUPFER, et al. Vibration analysis by digital speckle pattern shearing interferometry[J]. SPIE, 1997, 3098: 158-165.
  • 10PETZING J N. Vibration analysis using fast speckle metrology[J]. SPIE, 1999, 3745:134-140.

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