摘要
介绍了同位素微电池的工作原理及结构组成。阐明了其从工作原理上区别于原有的核电池,采用和太阳能电池光生伏特相似的辐生伏特效应。对同位素微电池的工艺作了详尽的介绍。提出了使用垂直侧壁方孔阵列的能量转换结构,相比传统的同尺寸开口且等深的倒三角直槽型或倒金字塔型的能量转换结构表面积增大了120%以上;引入了电镀区这一新结构,增强了同位素微电池的工作稳定性。
The working principle and fundamental structure of the novel micro battery were introduced. They are similar to the photo electrochemical cell （PEC） but different from the traditional thermoelectric radioisotrope cell. The device of vertical wall array was demonstrated, and the corresponding technological process was presented. Compared with traditional direct conversion devices, the surface area of new device increases by 120%, and it＇s stability is enhanced due to the introduction of the plated section.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2006年第5期434-438,共5页
Journal of Functional Materials and Devices
关键词
MEMS
放射性同位素微电池
辐生伏特
垂直侧壁方孔阵列
电镀区
microelectro mechanical system
radioisotrope micro battery
betavoltaic effect
vertical wall array
plated section
