苯并三氮唑缓蚀剂在铜表面覆盖行为的研究

STUDY ON COVERING BEHAVIOR OF BTA INHIBITOR ON PURE COPPER SURFACE

应用交流阻抗方法研究了高浓度氯离子条件下的铜表面苯并三氮唑(BTA)覆盖层随溶液中BTA浓度的变化规律.BTA浓度在0 mol/L^4.20×10-3mol/L之间时,BTA覆盖层不能完全覆盖铜表面,覆盖度随CaCl2溶液中BTA含量的增加而增加;BTA浓度大于4.20×10-3mol/L即可在铜表面形成较为完整的覆盖层,其覆盖度在0.8~0.9之间.BTA浓度小于9.42×10-3mol/L时,BTA覆盖层的厚度随浓度的提高也会有所增加;大于9.42×10-3mol/L后,BTA在铜表面的覆盖度和覆盖层厚度都达到稳定值.

The relationship of BTA covering behavior on a pure copper surface with BTA concentration in high concentrated chloride solutions has been investigated with alternative current （AC） impedance spectroscopy. When BTA concentration was between 0 and 4.20 ×10^-3mol/L, BTA could not cover the surface of copper entirely, the coverage increased with BTA concentration in CaCl2 solution. When BTA concentration was more than 4.20 ×10^-3 mol/L, the covering layer of BTA was much integrated with a coverage between 0.8 and 0.9. When BTA concentration was lower than 9.42 ×10^-3mol/L, the thickness of BTA covering layer would be increased with BTA concentration. When BTA concentration was more than 9.42 ×10^-3 mol/L, the thickness and coverage of BTA layer became steady.