环形透镜暗场落射照明系统设计及其焦移特性的研究

Design of Annular Lens Dark Field Vertical Illumination System and Its Focal Distance Offset Characteristics

环形透镜暗场落射照明系统越来越多被应用在特型显微镜上。该系统设计的难点是当采用现有的光学设计CAD软件设计计算时,由于环形透镜所具有的焦移特性的影响,难以保证预期的设计效果,也在一定程度上制约了该系统的推广应用。通过理论分析、实验论证和用自编制的照明设计CAD软件进行光线追迹,较好地确定了该系统的焦移量。并在此基础上提出了照明设计CAD与光学设计CAD软件互动迭代的设计方法。

The annular lens dark field vertical illumination system has been more and more applied in special microscopes. The difficult point of the design process of this system is that when the existing optical design CAD software is used to calculate lens, due to the influence of the focal distance offset character, it is hard to ensure the prospective design effect, therefore the application of this system is constrained in a certain extent. The offset of the focal distance of this system could be defined properly by preliminary theory analysis, experimental demonstration and tracing the ray using illumination CAD software that programmed by ourselves. A new method of using illumination design CAD and optic design CAD Interco version based on above works is proposed.