薄膜晶体管研究进展

Research Progress on Thin Film Transistor

薄膜晶体管是液晶显示器的关键器件,对显示器件的工作性能具有十分重要的作用。本文论述了薄膜晶体管的发展历史,描述了薄膜晶体管的工作原理,分析了非晶硅薄膜晶体管、多晶硅薄膜晶体管、有机薄膜晶体管、ZnO活性层薄膜晶体管的性能结构特点与最新进展,并展望了薄膜晶体管的应用。

Thin film transistor （TFT） which is of great importance in the properties of display devices is the key device of liquid crystal display. In this paper, the research history and the operating principles of TFT are described, meanwhile, the outstanding properties and recent research progress on thin film transistor such as amorphous silicon TFT, polycrystaUine silicon TFT, organic TFT and ZnO-Based TFT are analyzed. At last, the development trends of thin film transistor are forecasted.