摘要
报道了用激光全息刻写技术结合感光聚合材料体系制作介观尺度二维准周期结构(准晶).并在前期工作的基础上,研究了不同曝光量对二维空气柱孔径的影响,不同偏振对准晶结构花样的影响.实验结果显示,可以制作的二维准晶的空气柱孔径可达100nm,而且结构均匀,无缺陷面积大.用此实验系统可以制作多种花样二维甚至是三维准晶结构.目前,除激光全息刻写技术外,用其他传统精密机械加工技术来人工制作介观准晶体尚存在很大挑战性.
In this paper, we report the use of combining holography and photo-induced polymerization techniques to fabricate 2D mesoscale Penrose quasicrystals using 5 coherent beams. The effects of exposure dosage and polarizations of laser beams on the structures are studied. It is demonstrated that the air holes in the 2D quasicrytals could be as small as 0.1 μm for high exposure dosage samples. This setup can be used to fabricate versatile 2D mesoscale quasicrystals, and may also shed light on extending this method to 3D quasicrystals. Here we offer a novel method to fabricate quasicrystals which is simpler and cheaper than, if not superior to, the other traditional micro-fabrication methods.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2006年第10期5398-5402,共5页
Acta Physica Sinica
基金
青岛科技大学引进人才科研启动基金(批准号:0022208)资助的课题.~~
关键词
准晶结构
光子晶体
激光全息技术
quasicrystals, photonic crystals, holographic lithography