微机械振动陀螺仪闭环驱动电路分析与设计

Analysis and Design on the Closed-Loop Driving Circuit of Micromachined Vibratory Gyroscope

为了提高微机械振动陀螺仪输出信号的灵敏度,通常要求驱动信号频率与陀螺仪驱动模态的谐振频率相匹配,且驱动信号幅值稳定。驱动电压信号要满足这些要求,必须采用闭环驱动方式。完整地推导了闭环驱动电路的内在机理,探讨了自激振荡与锁相环两种实现方式,并给出了具体的电路原理框图。

In order to improve the output signal＇ s sensitivity of micromachined vibratory gyroscope, the frequency of the driving voltage is required to be equal to the resonant one of the gyroscope＇ s driving mode. Furthermore, the amplitude of the driving voltage must maintain steady. Only closed-loop driving circuit could meet these requirements. The mechanism of the closed-loop driving circuit is deduced mathematically. Two implementation methods of closed-loop driving circuit, including self-drive-oscillation and PLL, are discussed and the material circuit schemes are demonstrated,